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turbomolecular pump

turbomolecular pump

Product Introduction

The TwisTorr 74 FS is a small 70 L/s turbomolecular pump for R&D, UHV systems, nuclear research and electron microscopy. The pump delivers higher vacuum performance thanks to the synergy between the turbo stage and the innovative TwisTorr drag stage. Its suspension bearing technology guarantees extremely low vibration and noise, making it suitable for sensitive instruments and sensitive working environments. The unique cantilever suspension system ensures that your application will not be disturbed by magnetic fields or contaminated by hydrocarbons.

Product Introduction

Agilent offers unique, stable and reliable turbomolecular vacuum pumps and controllers that provide trusted vacuum environments in a wide range of applications in academia, research, nanotechnology, analytical instrumentation, and industry.
Agilent turbomolecular pumps have a pumping speed range of 70-2300 L/s, adopt many innovative designs, and are guaranteed by comprehensive testing and reliable after-sales support.

The TwisTorr 74 FS is a small 70 L/s turbomolecular pump for R&D, UHV systems, nuclear research and electron microscopy. The pump delivers higher vacuum performance thanks to the synergy between the turbo stage and the innovative TwisTorr drag stage.
      Its suspension bearing technology guarantees extremely low vibration and noise, making it suitable for sensitive instruments and sensitive working environments. The unique cantilever suspension system ensures that your application will not be disturbed by magnetic fields or contaminated by hydrocarbons.

Part Numberillustrateunit
X3502-64170
TwisTorr 74 FS Turbo Molecular Pump, DN 63 ISO-K
1 each
X3502-64171
TwisTorr 74 FS Turbo Molecular Pump, DN 40 ISO-KF
1 each
X3502-64172
TwisTorr 74 FS Turbo Molecular Pump, DN 63 CF-F (4.5" CFF) 
1 each
X3502-64173
TwisTorr 74 FS Turbomolecular Pump, DN 40 CF-F (2.75" CFF) 
1 each

characteristic

High compression ratio for light gases and design for hydrocarbon-free operation guarantee excellent ultimate pressure

Remote controller can be operated at a distance of 100 m

High backing pressure capability can use smaller backing pumps, reducing cost and floor space

Low vibration and noise (41 dB(A)) for a comfortable working environment and the ability to operate in sensitive laboratory environments

Maintenance-free bearings with zero operating costs

Small size allows installation in any position for easy integration

Vacuum gauge readout function for monitoring system pressure

Wireless control via the Vacuum Link app for anytime, anywhere pump operation

Anti-radiation and anti-magnetic field design, no embedded electronic equipment, can operate in strong magnetic field and radiation environment

Low electromagnetic emissions ensure no interference with the application process


Performance

H2 compression ratio
1 x 10 4
He compression ratio
2 x 10 5
N2 compression ratio
1 x 10 9
cooling method
air cooling    Water cooling
Foreline pipe flange size
KF 16 NW
Pre-stage withstand voltage—N2  
12mbar
Start Time
< 2 minutes
noise level
40dB(A)
work location
arbitrarily
Recommended Backing Pump Capacity
3 m³/h
Pumping speed—Ar
59 L/s
Pumping speed—H2
42 L/s
Pumping speed— He
54 L/s
Pumping speed - N2
60 L/s
Operating ambient temperature
+5 to +35°C
Highest Gas Throughput - Ar, Water Cooled
80 sccm
Highest Gas Throughput - N2, Water Cooled
130 sccm
Ultimate vacuum
<5 x 10 –10 mbar
Standards and Certifications
CE, C-CSA-US, RoHS
comply with 2011/65/UE requirements
Flange type
DN 63     KF40
storage environment temperature
-40 to +70°C
weight
2.05kg
Rated speed
70000 rpm (drive frequency 1167 Hz)

Technical Parameter

Application Areas

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