With the continuous development of electronic technology, for precision tiny (nanoscale)microelectronic devices is necessary to test their basic electrical performance (such as current, voltage, impedance, etc.). A high-precision probe platform equipped with a microscope can provide a good electrical testing environment. The device under test is amplified through a microscope and CCD, a high-precision micro probe is used to land on the device, and then external electrical testing instruments are connected for testing and analysis. In addition, for some small devices that need to be tested in high and low temperature environments, high and low temperature probe stations are the best choice for this type of testing.
The PSM-LN2 liquid nitrogen high and low temperature vacuum probe station can provide an high and low temperature (80K-800K) vacuum testing environment for the electrical parameter testing of semiconductor chips. By connecting different electrical measurement instruments, it can complete the detection of voltage, current, resistance, and IV curve parameters of integrated circuits, used for non-destructive electrical testing of chips, wafers, and devices in low temperature vacuum environments.
Main features:
• Liquid nitrogen high and low temperature vacuum probe station, the vacuum degree of the vacuum chamber can reach 10E-4 torr in 15 minutes.The probe station has low liquid nitrogen consumption, only 0.2L liquid nitrogen is needed cooling donw to 80K, which is convenient, fast and economical to use.
• The movement adjustment of the probe arm is operated outside the vacuum chamber, and different devices on the sample can be switched for testing without breaking the vacuum. The probe arm can be adjusted in four dimensions within the range of X-Y-Z-R, all probes can land at single point in a 2-inch diameter circle.
• The vacuum chamber is made of aluminum, which can effectively reduce external electromagnetic interference and improve the accuracy and stability of the test.
• The probe arm adopts triaxial connector, which has good lekage performance. The measured leakage current is less than 100fA@1V@80K~800K.
• The uniquely designed flexible probe is installed on a copper elastic piece to avoid excessive force during the probe landing that may cause damage to the sample or electrode.
