Cryogenic Probe Stations play a vital role in scientific research and technology development. It is capable of performing various non-destructive physical and electrical property tests on samples in a low-temperature environment, which helps researchers gain an in-depth understanding of the various physical and electrical properties of materials or devices, thus providing important data support for the research, development and application of new materials.
PSM-65K low-temperature probe station is an economical and compact closed-cycle low-temperature probe station, its compact and low-vibration design, can provide a <65K-350K high and low temperature vacuum test environment for the electrical parameter testing of semiconductor chips, through the external connection of different electrical measurement instruments, can complete the material/device IV, CV, optical and microwave parameter testing, to realize the low-temperature vacuum environment for the chip, wafer and device testing under low-temperature environment. Non-destructive electrical testing of chips, wafers and devices under low-temperature vacuum environment.

System Features:

- Small, low-vibration closed-cycle refrigeration without liquid helium consumption, with a minimum temperature of 65K.
- Vibration less than 1μm.
- Wide test temperature range, maximum 65K-350K continuous variable temperature support.
- Low power consumption, maximum input power 320W.
- Probe arm displacement adjustment is operated outside the vacuum chamber, allowing different devices on the sample to be switched for testing without destroying the vacuum.
- The unique four-dimensional X-Y-Z-R adjustment of the probe arm allows for testing of samples up to 4 inches in size.
- The probe arm adopts tri-coaxial connector with good leakage performance, measured leakage current is less than 100fA @1V@65K-350K.
- The vacuum cavity material is made of aluminum, which can effectively reduce the external electromagnetic interference and improve the accuracy and stability of the test.