Avantgarde room-temperature vacuum probe station can provide a room-temperature vacuum test environment for the electrical parameter testing of semiconductor chips. Through the external connection of different electrical measurement instruments, it can complete the testing of integrated circuits such as voltage, current, resistance, and IV curves, which can be used for the non-destructive electrical testing of chips, wafers, and devices in a room-temperature vacuum environment.

PSV series room-temperature vacuum probe station is a probe station specially developed for room-temperature vacuum electrical test environment, capable of repeating non-destructive, standard electrical experiments on 2-inch and 4-inch wafers, and can complete electrical characterization, parameter measurement, DC measurement, and RF measurement of devices by connecting to different external test equipment.

Main features:

• The vacuum chamber is capable of reaching an ultimate vacuum of 5E-4 mbar and is evacuated by means of a vacuum pump connected to the KF25 flange.
• The sample holder can hold wafer samples up to 4 inches, and the displacement adjustment of the probe arm is operated outside the vacuum chamber, which allows switching between different devices on the sample for testing without destroying the vacuum. The probe arm can be adjusted in four dimensions within the range of X-Y-Z-R, which can meet the maximum 4-inch range of all the positions of the lancing test.
• The vacuum cavity is made of aluminum, which can effectively reduce external electromagnetic interference and improve the accuracy and stability of the test.
• DC probe arm using three coaxial connectors, leakage performance is good, the use of 4200 measured leakage current is less than 100fA @ 1V.
• Uniquely designed flexible probe, the probe will be mounted on the copper shrapnel, to avoid excessive force during the zapping process leading to sample or electrode damage.
• Optional microwave probe arm, the highest frequency can reach 110GHz.

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